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1)
Outline of Steps步骤概述
00:
Calculation计算
The
system clears the dilution data of the last batch,
then calculates the necessary weight of the De-ionized
Water (hereafter referred to as “DI”) and the
Hydrogen Fluoride (hereafter referred to as “HF”).
系统清除上一批的稀释数据，然后计算除去离子的水（下文称作“DI”）和氢氟化物（下文简称HF）的重量
01:
DI ReceiveDI接收
The
Dilution Tank receives DI until its weight reaches
calculated value.
稀释箱接收DI直至其重量达到计算值。
02:
HF Receive接收HF
The
Dilution Tank receives the HF until its weight reaches
calculated value.
稀释箱接收HF直至其重量达到计算值。
NOTE:
In case of HF 100:1, the HF is once received to
the Measuring Pot, then dropped into the Dilution
Tank.
注意：如果HF100：1，HF一到达测量坩埚就将其注入稀释箱。
03:
Circulation循环
DI
and HF are mixed by circulation for the set time.
在规定时间DI和HF通过循环混合。
04:
Measure测量
The
concentration of Diluted HF is measured by the
concentration meter equipped in the circulation line.
稀释后的HF浓度由装在循环线上的浓度计测量。
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If
the concentration passes, the step progresses to
“07: Stand By”.
如果浓度达标，则进入“07”步：“待命”
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If the concentration fails, the operator selects
“Re-mix” or “Re-measure” or “Waste”.
By
pressing the “RE-MEASURE” button on the touch
screen, the “04: Measure” is repeated.
如果浓度未达标，操作员选择“重新混合”或“重新测量”或“废品”。按“RE－MEASURE”键重复进行“04：测量”。
By
pressing the “WASTE” button, the step returns to
“00: Calculation” after the Dilution Tank becomes
empty by manual draining.
按“WASTE”键，在人工清空稀释箱后返回“00：计算”
In
case that both “RE-MEASURE” and “WASTE”
buttons are not pressed, the step progresses to “05:
DI Re-receive”.
如果“RE-MEASURE”和“WASTE”键都没按，进行“05：重新接收DI”
05:
DI Re-receive重新接收DI
The
Dilution Tank receives DI until its weight reaches
re-calculated value.
稀释箱接收DI直到其重量达到重新计算的值。
06:
HF Re-receive重新接收HF
The
Dilution Tank or the Measuring Pot (in case of HF
100:1) receives the HF until its weight reaches
re-calculated value.
稀释箱或测量坩埚（如果HF100：1）接收HF直到它的重量达到重新计算的值。
07:
Stand By待命
The
Dilution Tank waits the demand signal from the Day
Tank.
稀释箱等待从日箱发出的请求。
08:
Transfer转移
The
diluted HF is transferred from the Dilution Tank to
the Day Tank until the Dilution Tank becomes empty or
the Day Tank becomes full (its level reaches “H”).
稀释的HF从稀释箱转移到日箱直到稀释箱倒空或日箱装满。（达到“H”）。
2)
Shift of Step步骤转换
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