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2.          N2 Supply TypeN2供给类型

2.1      Drum Container Sequence桶形容器流程

1)         Outline of Steps步骤略述

00: Drum Exchange 桶形容器更换

The operator presses the “EXCHANGE” button on the Control Panel to unlock the door of the Chemical Dispense Module (hereafter refers to as CDM) and takes out the empty Drum Container.

操作员按控制面板上的“EXCHANGE”键开启化学试剂配给模块(下文简称CDM)并取走桶形容器。

01: Barcode Check 条形码检查

The operator scans the barcode stuck on the Drum Container.

操作员扫描桶形容器上的条形码。

02: Coupler Connection耦合连接

The operator sets the Drum Container into the CDM, connects the chemical coupler and the N2 coupler and then closes the door.

操作员在CDM中设定桶形容器,连接化学试剂耦合器和N2耦合器然后将门闭合。

Then the operator presses the “START” button on the Control Panel.

接着操作员按控制面板上的“START”键。

03: Air Separation空气隔离

The Air Separator is charged up by chemical.空气隔离器充满化学试剂。

04: Drum Circulation桶循环

The chemical is circulated through Transfer Filter for the set time.

试剂在规定时间通过转移过滤器循环。

05: Transfer Wait转移等待

The Drum Container waits the demand from the Day Tank.

在把试剂转移到日箱前将其存放在桶形容器中。

06: Transfer 转移

The chemical is transferred from the Drum Container to the Day Tank until the Drum Container becomes empty and the level switch on the Air Separator turns OFF.

将试剂从桶形容器转移到日箱中,直到桶形容器倒空此时将空气隔离器上的开关关掉。

In case that the Day Tank becomes full (its level reaches “H”) before the Drum Container becomes empty, the step retrogresses to “05: Transfer Wait”.

如果在桶形容器倒空前日箱已满(达到“H”级),则退到“05”:转移等待。

2)         Shift of Step步骤转换

<< Condition of Step Shift >>
步骤转换的条件
00a: Normal Progression正常运行
The “EXCHANGE” button on the panel is pressed and the door is opened (the sensor turns OFF).
按面板上的“EXCHANGE”键开门(传感器关闭)
01a: Normal Progression正常运行 The barcode is verified.验证条形码
01b: Verify Error检验错误
The barcode is not verified.条形码未被验证。
02a: Normal Progression正常运行
The door is closed (the sensor operates).门关闭(开启传感器)
Then the “START” button on the panel is pressed.
(按面板上的“START”键)
03a: Normal Progression正常运行
The level switch on the Air Separator turns ON within the set time.
在规定时间内空气隔离装置上的水平开关打开。
03b: Empty Drum空桶
The level switch on the Air Separator does not turn ON within the set time.
在规定时间内空气隔离装置上的水平开关关闭。
04a: Normal Progression正常运行
The set time passes.超过规定时间
05a: Normal Progression正常运行
The demand from the Day Tank turns ON.
需要向日箱转移试剂,开关打开。
06a: Normal Retrogression正常后退
The demand from the Day Tank turns OFF.
开关闭合,不需往日箱转移试剂。
06b: Normal Returning正常返回
The level switch on the Air Separator turns OFF.
空气隔离器上的水平开关关闭。

3)         Valve Status in Each Step每步阀门的状态

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三电平矢量控制变频器CIMR-G7
通用矢量控制变频器CIMR-F7 
超小型通用矢量变频器CIMR-V7

美国通用电气公司

全数字直流装置DV-300
中压变频器TOSVERT-MV

GE-FANUC

90-30      90-70       series-6

株式会社 光洋

可编程控制器

光电旋转编码器

northstar

北极星编码器

pohn+Burkhardr

主令手柄
司机座椅及联动台
悬架式操纵按钮台

OCS

OCS一体化控制器 
LX触摸屏OCS
MiniOCS
OCS250
OCS SmartStix I/O

SmartStack™模块式I/O
SmartStix现场总线I/O
CBREEZE软件
新型彩色触摸屏TIU4/5/620
TIU产品

产品功能
应用说明
正常操作流程解释

其它产品

变频器用无感不锈钢电阻
变频器用无感波纹电阻
变频器用电抗器
安川变频器备品备件

VALVE

Container N2

容器N2

Container Outlet

容器出口

Air Separator

空气离析器Inlet

Air Separator Exhaust空气离析器排气

Container Return返回容器

Day Tank Inlet日箱进口

Door Lock

门锁

Transfer Pump转移泵

REMARKS备注

STEP

AV-01

AV-02A

AV-03A

AV-04

AV-05

AV-06

XX-01

P-01A

00: Drum Exchange
桶形容器更换

X

X

X

X

X

X

O

X

 

01: Barcode Check
检查条形码

X

X

X

X

X

X

X

X

 

02: Coupler Connection
耦合连接

X

X

X

X

X

X

X

X

 

03: Air Separation
空气隔离

O

O

O

O

X

X

O

O

 

04: Drum Circulation
桶循环

O

O

O

X

O

X

O

O

 

05: Transfer Wait
转移等待

X

X

X

X

X

X

O

X

 

06: Transfer
转移

O

O

O

X

X

O

O

O

 

O: Open, X: Close

In case that the Transfer Pump-A is maintaining:如果维持转移泵A的运转: