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This
explanation applies to the normal action of the PLC
programs (hereafter referred to as “sequence”) for
the Chemical Dispense Systems at the automatic mode.
此解释适用于自动化化工试剂配给系统PLC程序的正常运行的情况（以下简称“流程”）
The
sequences are categorized and applied as follows:
流程分为以下几种：
1)
N2 Supply Type N2供给类型
HNO3,
H3PO4, H2SO4, IPA, EBR
(5
chemicals)（5种化工试剂）
2)
Pump Supply Type 泵供给类型
HCL,
H2O2, NH4OH, DEV, PME, HF 49%, BOE 20:1, EKC800,
ACT935, HMDS
(10
chemicals)（10种化工试剂）
3)
Dilution Type（稀释类型）
DHF
10:1, DHF 10
:1
(2
chemicals)（2种）
Each sequence is composed of
the following component sequences.每种流程由以下子流程构成
Besides each component
sequence is composed of the sequential unit programs
(hereafter referred to as “step”).另外每个子流程由连续的单元程序构成（下文称为“步”）
1)
N2 Supply Type N2供给类型
a.
Drum
Container Sequence 桶形容器流程
It
mainly controls the transfer of the chemical from the
Drum Container to the Day Tank.
主要控制将化工试剂从桶形容器移至日箱的过程。
b.
Day
Tank Sequence日箱流程
It
mainly controls the receiving of the chemical from the
Drum Container and the transfer of the chemical to the
Dispense Pots.
主要控制从桶形容器接受试剂并将其移入配给坩埚的过程。
c.
Dispense
Pot Sequence 配给坩埚流程
It
mainly controls the receiving of the chemical from the
Day Tank and the supply of the chemical to the Points
of Use (hereafter referred to as “P.O.U.”).
主要控制从日箱接收试剂并将其分配到使用点（下文简称“P.O.U.”）的过程。
2)
Pump Supply Type泵供给类型
a.
Drum Container Sequence桶形容器流程
It
mainly controls the transfer of the chemical from the
Drum Container to the Day Tank.
主要控制将化工试剂从桶形容器移至日箱的过程。
b.
Day
Tank Sequence
It
mainly controls the receiving of the chemical from the
Drum Container and the supply of the chemical to the
P.O.U.
主要控制从桶形容器接受试剂并将其分配到使用点的过程。
3)
Dilution Type稀释类型
a.
Dilution
Tank Sequence稀释箱流程
It mainly controls the
dilution of original chemical and the transfer to the
Day Tank.
主要控制将原化学试剂稀释并移入日箱的过程。
b.
Day
Tank Sequence日箱流程
It mainly controls the
receiving of the diluted chemical from the Dilution
and the transfer of the diluted chemical to the
Dispense Pots.
主要控制从稀释箱接收稀释过的化学试剂并将其送入配给坩埚的过程。
c.
Dispense
Pot Sequence 配给坩埚流程
It
mainly controls the receiving of the chemical from the
Day Tank and the supply of the chemical to the P.O.U.
主要控制从日箱接收化学试剂并将其分配到使用点的过程。
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